Optimization of aberrations up to 3rd – order.
The WIEN-REFINE module takes the initial design of the column, and interactively refines it to optimise the performance. A electron beam column contains many design parameters that can be varied and there are numerous aberrations which each depend on the variable parameters. WIEN-REFINE allows the user to choose which design parameter to vary and which aberration to target. The program then runs several optimisation cycles and generally yields designs with better properties than those obtained through trial and error.
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